Design output structure of the electrostatic micro motor by UV-LIGA fabrication and electroplate technology

• Main Authors: Chen Lun Chiou, 邱振倫
• Other Authors: Kan-Pimg Chin
• Format: Others
• Language: zh-TW
• Published: 2001
• Online Access: http://ndltd.ncl.edu.tw/handle/07534660424440452477

碩士 === 國立交通大學 === 機械工程系 === 89 === The purpose of this research is to use the UV-LIGA fabrication and electroplate technology, which were already developed by our laboratory as the basis, and use the electrostatic micro motor as the framework to make a special design of the rotor geometry structure of the electrostatic micro motor to make an effective output and reach the effect of application. This research is based on two parts. First, we will derive the dynamic model and design the geometry shape of the variable-capacitance micro motor. Since the scale of the device is diminished, it has an evident difference with the large scale in the presentation of mechanical behaviors and characteristics. The derivation of the dynamic model and the design of the geometric shape is therefore much importation. Second, in respect to the layout of the UV-LIGA fabrication process and improve of the electroplate technology. The characteristic of UV-LIGA process is to use the uv-light and thick photo-resistance to achieve the effect of LIGA. So the whole processing design must be considered reasonably to prevent IC fabrication equipments from contamination. And must consider that the next fabrication of electroplate should make the process of UV-LIGA and electroplate connect effectively and avoid the problem of incompatible. 　　In this experiment, the multi coating technology was used to make the pattern, and electroplate was applied to the structure. The minimum dimensions of micro motor''s inside and outside radiuses are 285μm and 735μm, and the maximum dimensions are 1485 and 2615μm. And the thickness is 60μm. There are two different radiuses in the axis''s dimensions, 40μm and 80μm, and the gape is 15μm.