Ultrafiltration Membrane Treatment with Precoagulation to Recover CMP Wastewater in Semiconductor Industry
碩士 === 國立交通大學 === 環境工程所 === 89 === The development of Deep Submicron requires higher standard of CMP process. Rinses of wafer and ULSI need a large quantity of ultra pure water. Because of the shortage of water sources in Taiwan, the recycle and reuse of the CMP wastewater has become the interest o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31726952497099035938 |