Fingering Instability and Reduction of Photoresist Usage
博士 === 國立中央大學 === 機械工程研究所 === 89 === To reduce the photoresist usage and understand the film spreading process, this study performs flow visualization experiments and numerical simulations. This thesis is the first work to show that in the early stage of the spin coating process, the spreading of ph...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32661520847028629108 |