Design and Experimental Analysis of Driven XYθz Stage for Precision Position
碩士 === 國立彰化師範大學 === 工業教育學系 === 89 === The objective of this paper is to design and fabricate a piezoelectric actuator (PZT) with the consideration of overcoming the hysteresis effect, sensitivity of shear and bending stress etc. Applications of designated PZT on precision positioning machine, fast...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/31879413449247006193 |