Preparation and Characterization of Nanodiamond and c-BN Thin Films
碩士 === 國立東華大學 === 材料科學與工程研究所 === 89 === This study is to explore the preparation and structure of nano-diamond and c-BN films grown by MPCVD. The results indicate that increasing the Ar addition in CH4/H2 plasma, or increasing substrate bias voltage, the crystal size of diamond is reduced...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90649188921227847850 |