Multi-component Hard Ceramic Coatings and Thin Films
碩士 === 國立東華大學 === 材料科學與工程研究所 === 89 === Complex quaternary Ti-Si-C-N coatings obtained by atmospheric pressure chemical vapor deposition with TiCl4, SiCl4, C2H2, NH3, and Ar as reactants have been examined in this study. Hardness of the Ti-Si-C-N coating was higher than 11.5 GPa under the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47869977991993603324 |