Conjugated Thermal and Flow Analysis of the MOCVD Reactor
碩士 === 國立屏東科技大學 === 機械工程系 === 89 === The purpose of this research is to analyze the horizontal MOCVD reactor by using a computational fluid dynamics method. A commercial software (DesignStar 2.1) is used to obtain reactor’s velocity, thermal and conjugate heat transfer distribution of the gas....
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2001
|
Online Access: | http://ndltd.ncl.edu.tw/handle/84312272424430080583 |