Characterization of the SnO2 thin film derived from an ultrasonic atomization process
碩士 === 國立中山大學 === 材料科學研究所 === 89 === Abstract A thin film deposition system using ultrasonic atomization is designed and constructed. Solution containing precursors is transported by carrying gas to the heated substrate where deposition is accomplished by pyrolysis. Tests including series of varying...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24814001329313537925 |