Surface Acoustic Wave Properties of AlN Films on LiNbO3 Substrate
碩士 === 國立中山大學 === 電機工程學系研究所 === 89 === Aluminum nitride (AlN) thin films were deposited on Z-cut LiNbO3 substrates using the reactive RF magnetron sputtering in this thesis. By means of the analyses of XRD, SEM and AFM, the optimal deposition conditions of highly C-axis oriented AlN films were sputt...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/58653134894090465422 |