A Study on Nucleation and Growth of Electroless Copper on Ta(N) barrier

碩士 === 國立清華大學 === 材料科學工程學系 === 89 ===

Bibliographic Details
Main Authors: Pei-Yi Chen, 陳珮儀
Other Authors: Su-Jien Lin
Format: Others
Language:zh-TW
Published: 2001
Online Access:http://ndltd.ncl.edu.tw/handle/99662330008569283383