A Study on Nucleation and Growth of Electroless Copper on Ta(N) barrier

碩士 === 國立清華大學 === 材料科學工程學系 === 89 ===

Bibliographic Details
Main Authors:	Pei-Yi Chen, 陳珮儀
Other Authors:	Su-Jien Lin
Format:	Others
Language:	zh-TW
Published:	2001
Online Access:	http://ndltd.ncl.edu.tw/handle/99662330008569283383

id	ndltd-TW-089NTHU0159014
record_format	oai_dc
spelling	ndltd-TW-089NTHU01590142016-01-29T04:33:41Z http://ndltd.ncl.edu.tw/handle/99662330008569283383 A Study on Nucleation and Growth of Electroless Copper on Ta(N) barrier 無電鍍銅在Ta(N)阻隔層上成核與成長之研究 Pei-Yi Chen 陳珮儀碩士國立清華大學材料科學工程學系 89 Su-Jien Lin 林樹均 2001 學位論文 ; thesis 0 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 材料科學工程學系 === 89 ===
author2	Su-Jien Lin
author_facet	Su-Jien Lin Pei-Yi Chen 陳珮儀
author	Pei-Yi Chen 陳珮儀
spellingShingle	Pei-Yi Chen 陳珮儀 A Study on Nucleation and Growth of Electroless Copper on Ta(N) barrier
author_sort	Pei-Yi Chen
title	A Study on Nucleation and Growth of Electroless Copper on Ta(N) barrier
title_short	A Study on Nucleation and Growth of Electroless Copper on Ta(N) barrier
title_full	A Study on Nucleation and Growth of Electroless Copper on Ta(N) barrier
title_fullStr	A Study on Nucleation and Growth of Electroless Copper on Ta(N) barrier
title_full_unstemmed	A Study on Nucleation and Growth of Electroless Copper on Ta(N) barrier
title_sort	study on nucleation and growth of electroless copper on ta(n) barrier
publishDate	2001
url	http://ndltd.ncl.edu.tw/handle/99662330008569283383
work_keys_str_mv	AT peiyichen astudyonnucleationandgrowthofelectrolesscopperontanbarrier AT chénpèiyí astudyonnucleationandgrowthofelectrolesscopperontanbarrier AT peiyichen wúdiàndùtóngzàitanzǔgécéngshàngchénghéyǔchéngzhǎngzhīyánjiū AT chénpèiyí wúdiàndùtóngzàitanzǔgécéngshàngchénghéyǔchéngzhǎngzhīyánjiū AT peiyichen studyonnucleationandgrowthofelectrolesscopperontanbarrier AT chénpèiyí studyonnucleationandgrowthofelectrolesscopperontanbarrier
_version_	1718173268971618304

A Study on Nucleation and Growth of Electroless Copper on Ta(N) barrier

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