A Study of the Sputtering Processes and Application of Metal Compound Thin Films
碩士 === 國立清華大學 === 材料科學工程學系 === 89 === This research is to investigate the relationships between process parameters such as DC power, RF power, and oxygen partial pressure, and silver oxide thin films properties, such as composition, microstructures, optical and thermal properties. It is...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26000638554895497631 |