A study of nanoporous silica of low dielectric constant materials for ULSI applications
碩士 === 國立清華大學 === 材料科學工程學系 === 89 === Abstract Among various low-k materials, spin-on-glass (SOG) materials have been widely used as an interlayer dielectric in multilevel interconnections because of their ease of application and relatively low process costs. Porous materials are promisin...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06579644858380640381 |