Preparation and Properties of Lead Zirconate Titanate (PZT) Thick Films
碩士 === 國立清華大學 === 材料科學工程學系 === 89 === There are many methods to prepare PZT films. For examples, tape casting can be used to prepare films with thickness above 10 μm, and PVD methods can be used for films below 1μm thickness. However, it is difficult to prepare films of thickness between 1μm and 10μ...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15294219437767998557 |