The Fabrication and Characteristic Study of Nb Ti and NbN Multilayers Films by DC Sputtering

碩士 === 國立清華大學 === 物理學系 === 89 === The Fabrication and Characteristic Study of Nb Ti and NbN Multilayers Films by DC Sputtering

Bibliographic Details
Main Authors: Zhe-Ming Tsai, 蔡哲銘
Other Authors: Juh-Tzeng Lue
Format: Others
Language:zh-TW
Published: 2001
Online Access:http://ndltd.ncl.edu.tw/handle/48382324525149521888