The Fabrication and Characteristic Study of Nb Ti and NbN Multilayers Films by DC Sputtering
碩士 === 國立清華大學 === 物理學系 === 89 === The Fabrication and Characteristic Study of Nb Ti and NbN Multilayers Films by DC Sputtering
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2001
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Online Access: | http://ndltd.ncl.edu.tw/handle/48382324525149521888 |