Tunable Phase Grating Design & Fabrication - Using CMOS processes
碩士 === 國立清華大學 === 動力機械工程學系 === 89 === This thesis presents the study of a tunable phase grating using CMOS processes. Grating is an important and popular element in optical systems such as spectrometer. Due to the requirement of high precision, grating devices are expensive based on tradi...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34153678776358960298 |