A Single Layer Out-of-plane Micro Electro-Thermal Actuator
碩士 === 國立清華大學 === 動力機械工程學系 === 89 === Out-of-plane electro-thermal actuators have been applied to a variety of fields. Among them, the actuators whose driving method is bi-metal effect have the advantage of simple fabrication processes and are thus most commonly used. However, such an actuator exp...
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ndltd-TW-089NTHU03110522016-01-29T04:33:41Z http://ndltd.ncl.edu.tw/handle/99837998006278553167 A Single Layer Out-of-plane Micro Electro-Thermal Actuator 單層薄膜出平面微電熱式致動器 Wen-Chih Chen 陳文誌 碩士 國立清華大學 動力機械工程學系 89 Out-of-plane electro-thermal actuators have been applied to a variety of fields. Among them, the actuators whose driving method is bi-metal effect have the advantage of simple fabrication processes and are thus most commonly used. However, such an actuator experiences a shear force at the interface of different materials, while actuated. Delamination consequently takes place and therefore decreases its lifetime. In an attempt to overcome the drawback inherent in a bi-metal actuator, a novel bi-directional out-of-plane electro-thermal actuator of single layer thin film material is proposed. The presented actuator comprises four parallel, identical beams. The two inner beams connect the two outer beams with a step, which enables the inner beams and the outer ones located at different planes. While a current only flows through the inner beams, they would experience a temperature rise; the accompanying thermal expansion therefore enables the actuator to bend upwards. On the contrary, while a current only flows through the outer beams, the actuator would bend downwards. The bi-directional out-of-plane motion is thus achieved. The design was examined in light of finite element analysis. The potential application lies in micro-relays, variable capacitors, and optical scanning system. Weileun Fang 方維倫 2001 學位論文 ; thesis 76 zh-TW |
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碩士 === 國立清華大學 === 動力機械工程學系 === 89 === Out-of-plane electro-thermal actuators have been applied to a variety of fields. Among them, the actuators whose driving method is bi-metal effect have the advantage of simple fabrication processes and are thus most commonly used. However, such an actuator experiences a shear force at the interface of different materials, while actuated. Delamination consequently takes place and therefore decreases its lifetime. In an attempt to overcome the drawback inherent in a bi-metal actuator, a novel bi-directional out-of-plane electro-thermal actuator of single layer thin film material is proposed.
The presented actuator comprises four parallel, identical beams. The two inner beams connect the two outer beams with a step, which enables the inner beams and the outer ones located at different planes. While a current only flows through the inner beams, they would experience a temperature rise; the accompanying thermal expansion therefore enables the actuator to bend upwards. On the contrary, while a current only flows through the outer beams, the actuator would bend downwards. The bi-directional out-of-plane motion is thus achieved. The design was examined in light of finite element analysis. The potential application lies in micro-relays, variable capacitors, and optical scanning system.
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author2 |
Weileun Fang |
author_facet |
Weileun Fang Wen-Chih Chen 陳文誌 |
author |
Wen-Chih Chen 陳文誌 |
spellingShingle |
Wen-Chih Chen 陳文誌 A Single Layer Out-of-plane Micro Electro-Thermal Actuator |
author_sort |
Wen-Chih Chen |
title |
A Single Layer Out-of-plane Micro Electro-Thermal Actuator |
title_short |
A Single Layer Out-of-plane Micro Electro-Thermal Actuator |
title_full |
A Single Layer Out-of-plane Micro Electro-Thermal Actuator |
title_fullStr |
A Single Layer Out-of-plane Micro Electro-Thermal Actuator |
title_full_unstemmed |
A Single Layer Out-of-plane Micro Electro-Thermal Actuator |
title_sort |
single layer out-of-plane micro electro-thermal actuator |
publishDate |
2001 |
url |
http://ndltd.ncl.edu.tw/handle/99837998006278553167 |
work_keys_str_mv |
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