Design and Fabrication of MOS Type Gas Sensor with Vertically Integrated Heater Using CMOS-MEMS Technology

by Ya-Chu Lee, Ping-Lin Yang, Chun-I Chang, Weileun Fang
Published 2018-12-01

Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate

by Ming-Chuen Yip, Weileun Fang, Jhyy-Cheng Liou, Li-Che Chen, Ming-Yi Wang, Shaoyi Wu, Li-Chi Tsao, Tsung-Min Hsieh, Chien-Hsing Lee, Chien-Hsin Huang
Published 2011-06-01

Integration of Micro Probes and MEMS Components and Its Applications

by Bao-wen Chang, 張寶文
Published 2004

The Study of a Three-axis Driven Micro Robot Arm

by Heng Chung, Chang, 張恆中
Published 2003

Design, Implementation and Integration of CMOS-MEMS Motion Sensors

by Chang, Chun-I, 張俊羿
Published 2014

The Study of MEMS Self-Assembly Technology

by Yi-Ping Ho, 何亦平
Published 2002

Applying High Aspect Ratio BELST Process in Vertical Actuated Electrostatic Micro Scanning Mirror

by Chien Cheng Chu, 朱健誠
Published 2002

The Research of

by Chia Yu Wu, 吳嘉昱
Published 2002

The BELST Fabrication Platform for High-Aspect-Ratio Micromachining and Its Applications

by Jerwei Hsieh, 謝哲偉
Published 2002

The Hybrid Micromachined Silicon-Optical-Bench and Its Applications

by Hung-Yi Lin, 林弘毅
Published 2002

Novel Monolithic 3 axis CMOS MEMS Accelerometer

by Chuanwei Wang, 王傳蔚
Published 2008

The Research of Novel MEMS Filter in Hearing Aid Applications

by Shih-Hsorng Shen, 沈士雄
Published 2004

Fabrication and Design of variable optical attenuator utilizing <111> wafer

by Julius M. Tsai, 蔡明霖
Published 2004

On the vibration characteristics of micro free-free beam

by Chi-Sheng Yu, 余齊盛
Published 2004

Integration of the Electrothermal Actuator and Piezoresistive Sensor by CMOS Process

by Kai-Chih, Liang, 梁凱智

Integration of UV Curable Polymer Lens with MUMPs Structure on SOI Wafer

by Chun-Feng Lai, 賴群峰
Published 2004

On the Bending Tests of Micro-Cantilever Using Nanoindentation System

by Changchun Hsu, 徐昌駿
Published 2004

The Application of CNTs-polymer composites on MEMS

by Ting-Hsien Chen, 陳定憲
Published 2007

A NOVEL OUT-OF-PLANE ACCELEROMETER WITH FULLY-DIFFERENTIAL SENSING CIRCUIT AND SUB-MICRON GAP

by Ming-Han Tsai, 蔡明翰
Published 2007

The Study of a Novel Flexible Pressure / Tactile Sensors Array

by Chih-Fan Hu, 胡志帆
Published 2007