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Jhyy-Cheng Liou
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Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate
by
Ming-Chuen Yip
,
Weileun Fang
,
Jhyy
-
Cheng
Liou
,
Li-Che Chen
,
Ming-Yi Wang
,
Shaoyi Wu
,
Li-Chi Tsao
,
Tsung-Min Hsieh
,
Chien-Hsing Lee
,
Chien-Hsin Huang
Published 2011-06-01
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