A Single Layer Out-of-plane Micro Electro-Thermal Actuator
碩士 === 國立清華大學 === 動力機械工程學系 === 89 === Out-of-plane electro-thermal actuators have been applied to a variety of fields. Among them, the actuators whose driving method is bi-metal effect have the advantage of simple fabrication processes and are thus most commonly used. However, such an actuator exp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99837998006278553167 |