High Aspect Ratio Etching of Polyimide and Fabrication of Humidity Sensor
碩士 === 國立清華大學 === 電子工程研究所 === 89 === Polyimide films have widely been used in microcircuit fabrication and Micro-Electro-Mechanical System because they have many characteristics including low dielectric constant, easy processing, good step coverage ability, high heat resistance and chemical resistan...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/53294122880129045366 |