High Aspect Ratio Etching of Polyimide and Fabrication of Humidity Sensor
碩士 === 國立清華大學 === 電子工程研究所 === 89 === Polyimide films have widely been used in microcircuit fabrication and Micro-Electro-Mechanical System because they have many characteristics including low dielectric constant, easy processing, good step coverage ability, high heat resistance and chemical resistan...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2001
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Online Access: | http://ndltd.ncl.edu.tw/handle/53294122880129045366 |