The electrical properties of barium strontium titanate (Ba,Sr)TiO3 thin film capacitor and Metal-(Ba,Sr)TiO3-Semiconductor Field Effect Transistors
碩士 === 國立清華大學 === 電子工程研究所 === 89 === In this work , the electrical characteristics of Au/BST/Silicon(P-type) (MIS) capacitors and n-channel metal gate metal-oxide-semiconductor field effect transistors (MOSFET) with (BaxSr1-x)TiO3(BST) gate dielectric are investigated. The BST thin films...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75662932271929339177 |