Application of CFD in the Analysis of Air Flow Field in Clean Room Technology
碩士 === 國立清華大學 === 工程與系統科學系 === 89 === The technology development in semiconductor devices has been a fast growing business recently. The final performance of a device depends on how effective air cleanliness control is done in a clean room. Because the particle’s size is so tiny that it’s motion and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56783636468858112996 |