Electric Property Improvement and Boron Penetration Suppression in Metal-Oxide-Si Capacitors by Amorphous-Si Gate Electrode and Two-Step Nitridation
博士 === 國立臺灣大學 === 電機工程學研究所 === 89 === The improvement of electric property and reduction of boron penetration in metal-oxide-Si (MOS) capacitors are clearly achieved by the combination of a gate electrode deposited using amorphous Si (a-Si) and a gate oxynitride formed by a two-step N2O n...
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ndltd-TW-089NTU004420262016-07-04T04:17:06Z http://ndltd.ncl.edu.tw/handle/56048023417327035515 Electric Property Improvement and Boron Penetration Suppression in Metal-Oxide-Si Capacitors by Amorphous-Si Gate Electrode and Two-Step Nitridation 藉由非晶矽閘極及二階段氮化改善金氧半電容元件電性及抗硼穿透特性 Lee, Jung-Hsiang 李榮祥 博士 國立臺灣大學 電機工程學研究所 89 The improvement of electric property and reduction of boron penetration in metal-oxide-Si (MOS) capacitors are clearly achieved by the combination of a gate electrode deposited using amorphous Si (a-Si) and a gate oxynitride formed by a two-step N2O nitridation. The charge-to-breakdown performance of MOS capacitors fabricated by this technique is excellent. The hot-electron induced interface traps and flat-band voltage shifts are significantly reduced. This reliability improvement can be explained in terms of a mechanism based on an increase in compressive stress (macroscopic strain) in the oxynitride and relaxation of SiO2/Si interfacial strain. Also this improvement can be due to the reduction of hydrogen-related species diffused from the gate electrode, which is achieved by nitrogen pileup at the gate electrode/oxynitride interface. Boron penetration is significantly suppressed by an a-Si gate electrode because of a larger grain size and a longer dopant diffusion path. The boron penetration is also clearly reduced by a gate oxynitride formed using a two-step N2O nitridation. Boron penetration reduction for this oxynitride can be attributed to the nitrogen incorporation into the gate electrode/oxynitride interface. This approach would be useful for the processes of gate electrode and gate dielectric in the deep submicron MOS transistors. Feng Wu-Shiung Kuei-Shu Chang-Liao 馮武雄 張廖貴術 2001 學位論文 ; thesis 55 zh-TW |
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博士 === 國立臺灣大學 === 電機工程學研究所 === 89 === The improvement of electric property and reduction of boron penetration in metal-oxide-Si (MOS) capacitors are clearly achieved by the combination of a gate electrode deposited using amorphous Si (a-Si) and a gate oxynitride formed by a two-step N2O nitridation. The charge-to-breakdown performance of MOS capacitors fabricated by this technique is excellent. The hot-electron induced interface traps and flat-band voltage shifts are significantly reduced. This reliability improvement can be explained in terms of a mechanism based on an increase in compressive stress (macroscopic strain) in the oxynitride and relaxation of SiO2/Si interfacial strain. Also this improvement can be due to the reduction of hydrogen-related species diffused from the gate electrode, which is achieved by nitrogen pileup at the gate electrode/oxynitride interface. Boron penetration is significantly suppressed by an a-Si gate electrode because of a larger grain size and a longer dopant diffusion path. The boron penetration is also clearly reduced by a gate oxynitride formed using a two-step N2O nitridation. Boron penetration reduction for this oxynitride can be attributed to the nitrogen incorporation into the gate electrode/oxynitride interface. This approach would be useful for the processes of gate electrode and gate dielectric in the deep submicron MOS transistors.
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author2 |
Feng Wu-Shiung |
author_facet |
Feng Wu-Shiung Lee, Jung-Hsiang 李榮祥 |
author |
Lee, Jung-Hsiang 李榮祥 |
spellingShingle |
Lee, Jung-Hsiang 李榮祥 Electric Property Improvement and Boron Penetration Suppression in Metal-Oxide-Si Capacitors by Amorphous-Si Gate Electrode and Two-Step Nitridation |
author_sort |
Lee, Jung-Hsiang |
title |
Electric Property Improvement and Boron Penetration Suppression in Metal-Oxide-Si Capacitors by Amorphous-Si Gate Electrode and Two-Step Nitridation |
title_short |
Electric Property Improvement and Boron Penetration Suppression in Metal-Oxide-Si Capacitors by Amorphous-Si Gate Electrode and Two-Step Nitridation |
title_full |
Electric Property Improvement and Boron Penetration Suppression in Metal-Oxide-Si Capacitors by Amorphous-Si Gate Electrode and Two-Step Nitridation |
title_fullStr |
Electric Property Improvement and Boron Penetration Suppression in Metal-Oxide-Si Capacitors by Amorphous-Si Gate Electrode and Two-Step Nitridation |
title_full_unstemmed |
Electric Property Improvement and Boron Penetration Suppression in Metal-Oxide-Si Capacitors by Amorphous-Si Gate Electrode and Two-Step Nitridation |
title_sort |
electric property improvement and boron penetration suppression in metal-oxide-si capacitors by amorphous-si gate electrode and two-step nitridation |
publishDate |
2001 |
url |
http://ndltd.ncl.edu.tw/handle/56048023417327035515 |
work_keys_str_mv |
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