The feasible evaluation of CMP wastewater reclaim from Semiconductor Plants reclamation
碩士 === 國立臺灣大學 === 環境工程學研究所 === 89 === Recently due to the imposed regulations of government, all of the semi-conductor plants have been required to reduce raw water usage. Hence, it is utmost important to treat, reclaim and reuse wastewater. One of the established targets is the usage of wastewater...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60443407025617807343 |