Synthesis and Properties of SrRuO3 and RuO2 Thin Films Using Metalorganic CVD
碩士 === 國立臺灣科技大學 === 化學工程系 === 89 === Synthesis of strontium ruthenate and ruthenium oxide thin films have been carried out in a hot-wall tubular reactor, using Ru(C5H5)2 and Sr(DPM)2 precursors. The reactivity of Ru(C5H5)2 is much higher than that of Sr(DPM)2, and so is its volatility....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85370671627430898006 |