Investigation to Reactive-Ion Etching (RIE) Technique Using BCl3, for N-type GaN Epitaxial Materials
碩士 === 國立臺北科技大學 === 光電技術研究所 === 89 === Abstract GaN crystal has become one of the most remarkable photonic materials in the last decade. Blue luminescence of GaN devices makes full-color display into reality.Most importantly, its near-ultraviolet emitting attribute has greatly...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/82238861379575374699 |