The Excimer Laser and The Inductively Coupled Plasma Etching in the Development of Micro Chip Heat Pipe
碩士 === 國立臺北科技大學 === 機電整合研究所 === 89 === This thesis is to propose the chip type heat pipe design and manufacture. In the manufacture process make use both the Excimer Laser and Inductively Coupled Plasma (ICP) etching technology. It is the first time to combine these two technique and ap...
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| Format: | Others |
| Language: | zh-TW |
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2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41941324728977379745 |