X-ray Absorption Spectroscopy Studies of Amorphous Si-C-N Thin Films
碩士 === 淡江大學 === 物理學系 === 89 === This study measured x-ray-absorption near edge structure (XANES) spectra of Si-C-N thin films with different sputtering energy and carbon content at the C K-edge using the sample drain current mode and at the N K-edge using the fluorescence mode. We have fo...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79062975025166959851 |