Synthesis and Properties of Aluminum Oxide and Carbon Nitride Thin Films by Pulsed Magnetron Sputtering
博士 === 大同大學 === 材料工程研究所 === 89 === In this thesis research, synthesis and characterization of a number of technologically and scientifically interesting Aluminum oxide films and ultrathin carbon nitride coatings was investigated. Magnetron sputtering was utilized for film deposition and...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65336895269058548035 |