The Study and Application of PECVD Films on Impedance-Type Integrated Multifunctional Sensors
碩士 === 大同大學 === 材料工程研究所 === 89 === To fabricate the impedance-type integrated multifunctional sensitive devices on the Si wafer with Al electrodes, semiconductor manufacture technology was employed. Tin oxide (SnOx) organic-like thin films, as the intermediate layer or temperature sensor,...
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| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63067460823971542401 |