The Study of La3Ga5SiO14 Piezoelectric Ceramic using Pulsed Laser Deposition
碩士 === 大同大學 === 材料工程研究所 === 89 === The growth of La3Ga5SiO14(lanthanum gallium silicate) piezoelectric thin film was prepared by using pulsed laser deposition (PLD), which has the advantages of high depositing rate and maintaining the stoichiometrical ratio. The phase of target and thin f...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77554961981788845447 |