THE ANALYSIS FOR THE LARGE-AREA DIAMOND FILMS SYNTHESIZED AT LOW TEMPERATURE
碩士 === 國立雲林科技大學 === 電子與資訊工程研究所碩士班 === 89 === In this research, diamond films on 3 inches and 4 inches diameter (100) silicon wafers were synthesized using microwave plasma vapor deposition( MPCVD) in different negative bias and low temperature conditions, independently. The bias voltage a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96633341921439956799 |