Study on Low Dielectric Constant Material For ULSI Applications

碩士 === 國立雲林科技大學 === 電子與資訊工程研究所碩士班 === 89 === Study on Low Dielectric Constant Material For ULSI Applications Student: Kai-Huang Chen Advisor : Dr. Jian-Yang Lin Dr. Ting-Chang Chang Institut...

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Bibliographic Details
Main Authors: Kai-Huang Chen, 陳開煌
Other Authors: Jian-Yang Lin
Format: Others
Language:zh-TW
Published: 2001
Online Access:http://ndltd.ncl.edu.tw/handle/49694535210136444113