A Backpropagation Neural Network for The End Point Curve Pattern Recognize of ETCH Process in SEMICONDUCTOR Manufacture
碩士 === 中華大學 === 科技管理研究所 === 90 === The end point curve of an etching process in semiconductor manufacture can be used to determine the quality of a product . The product line can monitor the change of the end point curve on real time to avoid the abnormal product produced to minimize the defect loss...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67304138917270572270 |