車輛導航用之微機電加速儀研究
碩士 === 中華大學 === 機械與航太工程研究所 === 90 === This research is to use he IC planar technology to integrate MEMS XY-axes accelerometers and Z-axis rate gyro into a single chip. Thus both the volume and interconnections can be reduced and shortened. There are only four masks, the SiO2 is as the sacrifical lay...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48445096398775496488 |