Study and fabrication of thin film SAW devices
碩士 === 中原大學 === 電子工程研究所 === 90 === Abstracts This thesis researches the deposition of the piezoelectric film to fabricate the SAW devices on non-piezoelectric substrates. The main target is to investigate the process compatible with Si technology. Due to the excellent piezoelectricity, high surface...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49269606670390691087 |