Growth of Large-area YBa2Cu3Oy filmsand Application on Superconducting microwave devices
碩士 === 大葉大學 === 電機工程研究所 === 90 === The double-sided high-Tc superconducting (HTS) YBa2Cu3Oy (YBCO) films were grown on LaAlO3 (LAO) substrates by an off-axis magnetron sputtering system with two 2-inch sputtering guns. High-quality YBCO films within a f 50 mm diameter area were obtained....
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/84217575305059324019 |