The Studay of Piezoelectric force microsensors
碩士 === 逢甲大學 === 自動控制工程學系 === 90 === Based on silicon-based micro-fabrication technology, the piezoelectric force microsensor are designed. Four sets of piezoelectric devices are designed on the silicon wafer with a cross-shaped cantilever beam for measureing the multi-directional forces. The develop...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75929801549473656069 |