Investigations of the AlGaN films and AlN/AlGaN superlattices grown by Atomic Layer Epitaxy
碩士 === 逢甲大學 === 材料科學所 === 90 === Abstract The purpose of this study is to explore the effects of the growth conditions on the crystal structure, crystallinity and optical properties of the high Al content AlxGa1-xN films and AlN/AlxGa1-xN superlattices. The samples were grown on (0001) sapphire sub...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/gc6eb9 |