A study of ultraviolet annealing of AZO,IZO,ITO transparent conductive films prepared by RF magnetic sputtering deposition
碩士 === 輔仁大學 === 物理學系 === 90 === A study of ultraviolet annealing of AZO,IZO,ITO transparent conductive films prepared by RF magnetic sputtering deposition Student：TZU-CHANG Lin Advisor：K.J. Ling Abstract We used magnetron RF sputterin...
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| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39634701227472036450 |