Neutron-Irradiation then O2-Rapid Thermal Annealing Effect on the Microstructural Properties and Reliability of Sputtered Ta2O5/TiO2 Composite Films
碩士 === 義守大學 === 電子工程學系 === 90 === Tantalum pentoxide (Ta2O5)/titanium dioxide (TiO2) composite films were reactively sputtered deposited on P+-type silicon substrate from a tantalum pentoxide and titanium dioxide target using Ar/O2 gas mixtures by reactive sputtering. The effects of neutr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90170964660183956864 |