Deposition and characterization of AIN thin films using a dual ion beam sputtering system
碩士 === 國立中興大學 === 材料工程學研究所 === 90 === Thin films of aluminum nitride exhibit a number of interesting features such as high thermal conductivity, high electrical resistivity, high surface acoustic wave speed, high hardness, high melting points, wide band gap and chemical inertness. Owing to its excel...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01075291734304189418 |