Design and Analysis of A Linear Motion Stage
碩士 === 國立中興大學 === 機械工程學系 === 90 === The purpose of this research is to modularize and standardize single-axis linear stages, which have been versatilely used in applications such as wafer and semiconductor elements transportation. Standardized stages offer equipment providers the flexibi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18601243546920716496 |