Low Temperature Growth of Carbon Nanotubes by Chemical Vapor Deposition and Plasma Assisted Chemical Vapor Deposition
博士 === 國立成功大學 === 化學工程學系 === 90 === The growth of carbon nanotubes at low temperature was studied by thermal chemical vapor deposition and plasma chemical vapor deposition methods. By thermal chemical vapor deposition method, carbon nanotubes could be synthesized from 400 to 700℃at 90Torr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43455215312083945152 |