Nanostructured titanium-aluminum-carbonitride system coatings prepared by plasma enhanced chemical vapor deposition

博士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 90 === Titanium-aluminum-carbonitride system nanostructured coatings are investigated in this study. Firstly the effects of graded interlayer and coffee-bean-like morphology on the preferred orientation of Ti-C-N coatings are discussed. TiN, TiC, and TiCxN1-x were...

Full description

Bibliographic Details
Main Authors: Jiann Shieh, 謝健
Other Authors: Min Hsiung Hon
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/y88qvw