Investigation of Mo5Si3/Si3N4 nanocomposites via Metal Organic Chemical Vapor Deposition and Densification Process
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 90 === The metal-organic chemical vapor deposition (MOCVD) conducted in fluidized bed has been employed for the preparation of nano-sized molybdenum silicide and silicon nitride composites. Molybdenum octooxyhydride was decomposed and molybdenum oxide was deposit...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8x6zbt |