The research of LiNbO3 thin film
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 90 === LiNbO3 thin films were deposition on Si and Sapphire substrate by RF Sputtering deposition technique. The growth temperature and Ar/O2 gas ratio were varied during the deposition of LiNbO3. The power was 150W and the distance between target and substrate wa...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27a34m |