Computer Aided Analysis ofMagnetron Cathode in Sputtering Chamber
碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 90 === It is known that the sputter deposition technology has been widely applied in semiconductor industry. However, the problem of short cycle life of target in magnetron sputtering system has been a major issue. An inclined magnet design in magnetron cathode is...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/zue764 |