SiO2 Grown by Photo-CVD and it's Application of SiC MSM/MIS Photodetectors
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 90 === Owing to the high melt-point, high thermal-conductivity, high carrier saturation velocity, high breakdown field and obviously chemical inactivation of SiC materials, MSM photodetectors were applied on SiC. Transparent electrodes ITO were used on photodetecto...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15846905695573747246 |